Introduction

WaferMap Convert version 2.0 is a modular translator for wafer maps. It is built in a way that enables Artwork to add additional input and output formats as customer demand dictates.

Input Formats

There are hundreds or more variations on the wafer map -- through a certain minimum amount of information is present in all these variations. Most variations include a header that describes parameters such as units, wafer diameter, Lot identification, stepping size, types of bin codes and location of alignment marks.

The actual bin codes can use ASCII characters or numbers or HEX characters to represent pass, fail, null and other classifications.

Binary Formats

Many older wafer probers output proprietary binary files. There are standards for binary data (e.g. SECS II) but many probers created their own binary format. These are often poorly documented so it is much more difficult to write a reader for binary formats.

Supported Input Formats

A list of supported input formats can be found at this link: Supported Input Formats

Output Formats

The conversion to an output map file involves interpreting the parameters and bin codes of the input and then re-formatting the data as needed per the requirements of the output format. Very often an output format (such as SEMI E142) will require or expect parameter information that was not present in the input map file. The user must then intervene to add this information from a dialog.

Supported Output Formats

A list of supported input formats can be found at this link: Supported Output Formats

Glossary of Terms

Different manufacturer's have different terms for the same concept related to wafer mapping. We've attempted to define all the appropriate terms in one place so as to help make some sense out of the various formats. You can find the glossary here: Wafer Map Glossary of Terms

Program Operation

ASY to SEMI-E142

We will illustrate the use of the program by making several conversions of different formats. In the first example we will convert from a format known as ASY to SEMI-E142. Because ASY lacks some of the parameters required by E142 the user will need to enter those manually.

Start the program by double clicking on the WaferMap Convert shortcut. The main dialog should open.

Now use the drop downs to set your input format to ASY and your output format to SEMI-E152.

Use the Input | Browse... button and navigate to the file you wish to convert. In this case it is a file of type ASY. Set the drop down format to ASY.

The dialog should now look like this:

main dialog once the input file and type have been selected

Now click on the Scan button. A new dialog should appear:

This dialog highlights two values needed by E-142 that are not present in ASY. The user must enter the units of the input file and also a Layout ID..

the dialog shows the user two mandatory parameters required for E142 output.

Since the ASY format has no dimensional parameters (such as die width and height) we are free to enter any units we like. We've decided on MM. As for the layout ID, we have entered the Lot number string from the ASY file.

If we want to review or edit any other parameters, we should click on the Configuration button. This will open a new dialog that shows items such as bin code mapping, origin location and device width/height.

The Configuration dialog will show the parameters for E142. Some values are filled out as they are picked up from the ASY file. Other parameters are blank and it is the user's responsibility to fill them in.

For example, ASY has no info about wafer diameter. It also does not include information about the die step size (or die size).

We are going to enter the following: Wafer diameter = 200. Die Step Size X = 2.45 and die step size Y = 2.027 . Map Type (2D Array).

Notice that the conversion program has located all of the reference devices and created a separate bin code for them.

Here is what the dialog looks like after the missing information has been filled in.

Click on OK to accept the new information and close the dialog.

Click on Convert to start the conversion. You will see the main menu confirm the conversion was successful.

Here's what the output XML file looks like:

what the E142 data looks like after conversion for ASY.

More Conversion Examples

You can review more conversion examples below: